Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Reflectivity data for GeTe bulk and film are fitted to those computed from the free-carrier dispersion relations. Results show that the optical dielectric constant is about 37.5 and 35 at 300 and 4.2°K respectively. The optical conductivity determined is lower than the conductivity measured for the bulk, while they are about equal for the film. © 1967.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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IEEE J-STARS
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MRS Fall Meeting 2020
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Micro and Nano Engineering