PaperMechanism of microwave plasma etching of polyimides in O2 and CF4 gas mixturesN.J. Chou, J. Parazsczak, et al.Microelectronic Engineering
PaperEffect of O+ and Ne+ implantation on the surface characteristics of thermally oxidized SiN.J. Chou, B.L. CrowderJournal of Applied Physics
PaperDielectric loss in thin films of an aromatic polyimideM.O. Aboelfotoh, C. Feger, et al.Applied Physics Letters
PaperAuger and ellipsometric studies of ultra-thin PbO growth on leadN.J. Chou, J.M. Eldridge, et al.Journal of Electronic Materials
