Conference paperCharacterization of photoresist spatial resolution by interferometric lithographyJohn A. Hoffnagle, William D. Hinsberg, et al.Microlithography 2003
PaperA generic grouping algorithm and its quantitative analysisArnon Amir, Michael LindenbaumIEEE Transactions on Pattern Analysis and Machine Intelligence
Conference paperTotal Source Mask Optimization: High-capacity, resist modeling, and production-ready mask solutionMoutaz Fakhry, Yuri Granik, et al.SPIE Photomask Technology + EUV Lithography 2011