Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
An orientation of an undirected graph is a choice of direction for each of its edges. An orientation is called ideal with respect to a given set of pairs of vertices if it does not increase the shortest-path distances between the members of any of the pairs. A polynomial-time algorithm is given for constructing an ideal orientation with respect to two given pairs and any positive edge-lengths, or else recognizing that no such orientation exists. Moreover, we show that this problem is in the class NC. For a general number of pairs the problem is proven NP-complete even with unit edge-lengths. © 1989.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
J. LaRue, C. Ting
Proceedings of SPIE 1989
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena