Conference paper
Optimization of real phase-mask performance
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
L Auslander, E Feig, et al.
Advances in Applied Mathematics