Hsinyu Tsai, Stefano Ambrogio, et al.
VLSI Technology 2019
Phase transformation generally begins with nucleation, in which a small aggregate of atoms organizes into a different structural symmetry. The thermodynamic driving forces and kinetic rates have been predicted by classical nucleation theory, but observation of nanometer-scale nuclei has not been possible, except on exposed surfaces. We used a statistical technique called fluctuation transmission electron microscopy to detect nuclei embedded in a glassy solid, and we used a laser pump-probe technique to determine the role of these nuclei in crystallization. This study provides a convincing proof of the time- and temperature-dependent development of nuclei, information that will play a critical role in the development of advanced materials for phase-change memories.
Hsinyu Tsai, Stefano Ambrogio, et al.
VLSI Technology 2019
Geoffrey W. Burr, Robert M. Shelby, et al.
IEEE T-ED
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Geoffrey W. Burr, C. Michael Jefferson, et al.
Optics Letters