Paperlow Temperature Silicon Epitaxy by Hot Wall Ultrahigh Vacuum/Low Pressure Chemical Vapor Deposition Techniques: Surface OptimizationB.S. Meyerson, E. Ganin, et al.JES
PaperProperties of hard tungsten films prepared by sputteringK.K. Shih, D.A. Smith, et al.Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperThe development of grain structure during growth of metallic filmsC.R.M. Grovenor, H.T.G. Hentzell, et al.Acta Metallurgica
PaperElectron beam evaporation of oriented Nb films onto GaAs crystals in ultrahigh vacuumM. Eizenberg, D.A. Smith, et al.Applied Physics Letters
