Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Chidanand Apté, Fred Damerau, et al.
ACM Transactions on Information Systems (TOIS)
Elena Cabrio, Philipp Cimiano, et al.
CLEF 2013
Rolf Clauberg
IBM J. Res. Dev