Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
New omega results are given for the error term in a weighted divisor problem, improving results of Schierwagen. The Ω+ result is improved (surprisingly, perhaps) by a logarithm factor in all cases. The methods are similar to earlier results of the author for Dirichlet's divisor problem and in fact, with a slight modification of the argument, include that result as a special case. The Ω- result is improved by an exponential of iterated logarithms, similar to results of Kátai and Corrádi, and Joris and Redmond. Both results rely on a Voronoi-type identity for the error term due to Krätzel. © 1988.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
M.B. Small, R.M. Potemski
Proceedings of SPIE 1989
R.B. Morris, Y. Tsuji, et al.
International Journal for Numerical Methods in Engineering
M. Shub, B. Weiss
Ergodic Theory and Dynamical Systems