A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Thin films of an ordered polystyrene-polymethyl(methacrylate) (PS-PMMA) diblock copolymer was formed over full 8-in.-diam silicon wafers and on various substrate materials. The important process parameters for forming the nanoscale templates were analyzed. It was found that under proper conditions, well-ordered hexagonal arrays of sub-20 nm domains can be formed on a tight pitch.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
P.C. Pattnaik, D.M. Newns
Physical Review B
Eloisa Bentivegna
Big Data 2022
Peter J. Price
Surface Science