Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A report on the progress in nanofabrication technology was presented. The principles and limits of the various pattern formation techniques which have emerged as important tools in the research nanoscale devices and structures were discussed. Topics such as electron beam lithography, imprint lithography, proximal probes and self assembly were also discussed.
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
A. Krol, C.J. Sher, et al.
Surface Science
Douglass S. Kalika, David W. Giles, et al.
Journal of Rheology
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008