Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
We study multihomogeneous analytic functions and a multihomogeneous Newton's method for finding their zeros. We give a convergence result for this iteration and we study two examples: the evaluation map and the generalized eigenvalue problem.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Linear Algebra and Its Applications
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