Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A spherical harmonics expansion method of the Boltzmann Transport Equation (BTE) in the three-dimensional space is proposed. The method is quite general in terms of scattering matrix and band structure. We show a numerical application to a two-dimensional p-n junction. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics
F.M. Schellenberg, M. Levenson, et al.
BACUS Symposium on Photomask Technology and Management 1991
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics