Yannick Baumgartner, C. Caer, et al.
ECOC 2018
CMOS-compatible III-V lasers integrated on silicon are a crucial step to reduce power consumption and cost for next-generation optical transceivers. Here, we demonstrate a concept to co-integrate III-V lasers into a CMOS Silicon Photonics platform, in which lasers, photonics, and electronic circuitry share the same back end of line. Based on a bonded III-V epitaxial layer stack, ultra-thin laser devices, optically pumped lasing and coupling to silicon are demonstrated. Furthermore, we present all building blocks for electrically pumped laser devices.
Yannick Baumgartner, C. Caer, et al.
ECOC 2018
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Herwig Hahn, Marc Seifried, et al.
DRC 2017
Marc Seifried, Herwig Hahn, et al.
ICTON 2017