William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
No abstract available.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009