Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The magnetic and structural properties of epitaxial Co/Pt superlattices, oriented along the [001], [110] and [111] directions of Pt, are presented. We find that the magnetic properties of the superlattices are reproducible and distinctly different for the different orientations. For structures with 3.2Å Co/16.7Å Pt, the easy axis of magnetization is perpendicular to the film plane for growth along Pt[111] but in the film plane for growth along [001]. The [110] oriented superlattices have intermediate behaviour. X-ray and TEM analysis of the superlattices reveals significant differences in interface quality and defect structure for the different orientations. These effects may play a more important role in the origin of magnetic anisotropy than previously assumed. © 1991.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sung Ho Kim, Oun-Ho Park, et al.
Small
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999