Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Crosstalk induced in a meander delay line produces a significant amount of waveform distortion and data-dependent jitter at the output port. This paper introduces an interpretation of the eye-diagram distortion and the jitter generation mechanism based on a time-domain even- and odd-mode analysis of a coupled transmission line structure. From the proposed analysis, this paper proposes jitter-estimation equations for both the short and long unit line delay cases. The eye-diagram distortion and timing jitter are predicted and estimated, respectively. In order to verify the jitter-estimation equations, a series of microstrip-type printed circuit board test vehicles with the meander delay line are fabricated and tested. The measured jitter shows good agreement with the proposed jitter-estimation equations. © 2008 IEEE.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters
Sung Ho Kim, Oun-Ho Park, et al.
Small
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME