David W. Abraham, Yves Martin, et al.
Proceedings of SPIE 1989
We demonstrate a new method for imaging vertical and near vertical surface features by atomic force microscopy (AFM). It is based on an attractive force mode AFM, equipped with a special boot-shaped tip, coupled with a measurement of slope and with a special tracking technique. Surface profiling is achieved through a novel servo and scanning system. Mapping sidewall profile opens the door to measurement of critical dimensions (width and wall angles) of lines and trenches in integrated circuits, with high accuracy.
David W. Abraham, Yves Martin, et al.
Proceedings of SPIE 1989
Yves Martin, David W. Abraham, et al.
Applied Physics Letters
William M. J. Green, Eric J. Zhang, et al.
OFC 2019
William M. J. Green, Chi Xiong, et al.
NANOCOM 2016