Chu C. Teng, Chi Xiong, et al.
CLEO 2017
We demonstrate a new method for imaging vertical and near vertical surface features by atomic force microscopy (AFM). It is based on an attractive force mode AFM, equipped with a special boot-shaped tip, coupled with a measurement of slope and with a special tracking technique. Surface profiling is achieved through a novel servo and scanning system. Mapping sidewall profile opens the door to measurement of critical dimensions (width and wall angles) of lines and trenches in integrated circuits, with high accuracy.
Chu C. Teng, Chi Xiong, et al.
CLEO 2017
Eric J. Zhang, Yves Martin, et al.
SPIE DCS 2019
Kerem Unal, Jane Frommer, et al.
Applied Physics Letters
Hussam Khonkar, Brent Wacaser, et al.
CPV 2013