G.M. Wallraff, Carl E. Larson, et al.
J. Photopolym. Sci. Tech.
G.M. Wallraff, Carl E. Larson, et al.
J. Photopolym. Sci. Tech.
F.A. Houle, W.D. Hinsberg
Applied Physics A: Materials Science and Processing
N. Zhou, K. Racette, et al.
SPIE Photomask Technology + EUV Lithography 2008
F.A. Houle, V.R. Deline, et al.
Macromolecules