E.C. Jones, M. Ieong, et al.
DRC 2001
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
E.C. Jones, M. Ieong, et al.
DRC 2001
Douglas W. Cooper
Microcontamination
Veeraraghvan S. Basker, Theodorus E. Standaert, et al.
VLSI Technology 2010
Douglas W. Cooper
Microcontamination