Conference paper
Channel doping impact on FinFETs for 22nm and beyond
Chung-Hsun Lin, R. Kambhampati, et al.
VLSI Technology 2012
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
Chung-Hsun Lin, R. Kambhampati, et al.
VLSI Technology 2012
Douglas W. Cooper
International Aerosol Conference 1983
Douglas W. Cooper
Journal of Aerosol Science
E.C. Jones, M. Ieong, et al.
DRC 2001