M.J. Rooks, G.M. Cohen, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The paper on which this article is based is reprinted with permission from the Institute of Environmental Sciences Proceedings, Annual Technical Meeting, 1991. The authors discuss the results of work undertaken to compare several different types of particle counters, having different flow rates and particle size detection abilities, when tested in a small cleanroom under both normal and reduced-flow operating conditions.
M.J. Rooks, G.M. Cohen, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Douglas W. Cooper, H.L. Wolfe, et al.
Annual Technical Meeting of Institute of Environmental Sciences 1989
H. Kawasaki, M. Khater, et al.
IEDM 2008
Masahide Terazima, Noboru Hirota, et al.
Pure and Applied Chemistry