Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This review considers recent developments in MBE growth of artificially-layered magnetic-metal structures on both semiconductors and insulating substrates. It is seen that the ability to seed specific orientations of such structures and to probe their structural and chemical properties with a variety of in situ probes is a key advantage of MBE over more conventional deposition techniques. In particular, interface formation can be probed during growth. This is helpful in developing a realistic picture of interfaces in such structures and in relating magnetic properties to interface structural and chemical properties. Furthermore, the growth of epitaxial structures permits the detailed characterization of atomic and interface structure with X-ray diffraction and electron microscopy. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A.B. McLean, R.H. Williams
Journal of Physics C: Solid State Physics
P. Alnot, D.J. Auerbach, et al.
Surface Science
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983