Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Scanning tunneling spectroscopy is used to study p-type Ge(111)c(2x8) surfaces over the temperature range 7 to 61 K. Surface states arising from adatoms and rest atoms are observed. With consideration of tip-induced band bending, a surface band gap of 0.5±0.1 eV separating the bulk valence band from the surface adatom band is deduced. Peak positions of adatom states are located at energies of 0.09±0.02 eV and 0.24±0.03 eV above this gap. A spectral feature arising from the inversion of the adatom state occupation is also identified. A solution of Poisson's equation for the tip-semiconductor system yields a value for the interband current in agreement with the observations, for an assumed tip radius of 100 nm. The rest-atom spectral peak, observed at ≈1.0 eV below the valence band maximum, is observed to shift as a function of tunnel current. It is argued that nonequilibrium occupation of disorder-induced surface states produces this shift. ©2005 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993