Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hopscotch methods for solving time dependent partial differential equations are derived using a locally-one-dimensional splitting instead of the standard alternating direction splitting. This is a natural extension of such methods and their possible flexibility in certain situations is discussed. © 1978.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Harpreet S. Sawhney
IS&T/SPIE Electronic Imaging 1994
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007