E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The epitaxial growth process for the preparation of thin (1-10 μm) epi-layers of magnetic garnet on a non-magnetic garnet substrate is described. Growth rates are related to growth and liquids temperatures, time, and rotation rate. The growth mechanism is interpreted in terms of diffusion boundary layer theory. Film composition is discussed in terms of growth parameters. © 1972.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
A. Gangulee, F.M. D'Heurle
Thin Solid Films
J.A. Barker, D. Henderson, et al.
Molecular Physics
K.N. Tu
Materials Science and Engineering: A