Conference paper
Sub-50 ps single poly planar bipolar technology
T.C. Chen, D.D. Tang, et al.
IEDM 1988
Sol-gel methods combined with specific thermal treatments were used to fabricate porous glasses with extremely uniform pore diameters and high internal surface areas. Low-temperature adsorption isotherm measurements reveal the dynamic and thermodynamic stability limits of the liquid films as a function of evolving pore diameter. Contrary to classical predictions, the results are in remarkable agreement with a universal hydrodynamic theory of film behavior which includes substrate interactions. © 1986 The American Physical Society.
T.C. Chen, D.D. Tang, et al.
IEDM 1988
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