Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
The combination of two or more generalized Crank Nicolson schemes in order to obtain second, third and fourth order accurate discretizations in time is considered. Particular attention is given to the stability properties of the methods proposed. © 1981, by Academic Press Inc. (London) Limited.
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
A. Skumanich
SPIE OE/LASE 1992
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007