Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this study, the morphology of pani is examined in the base form as processed from NMP and from NMP containing LiCl. LiCl is found to induce an intermolecular as well as an intramolecular structural change in the polymer as evidenced by dramatic changes in the bulk properties such as molecular weight distribution, glass transition temperature, and optical absorbance as well as on the surface structure properties. The experimental results clearly show that LiCl dramatically impacts the properties of pani base and induces higher conductivity upon doping.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
John G. Long, Peter C. Searson, et al.
JES
Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
O.F. Schirmer, W. Berlinger, et al.
Solid State Communications