Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Daniel M. Bikel, Vittorio Castelli
ACL 2008
G. Ramalingam
Theoretical Computer Science
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Discrete Mathematics and Theoretical Computer Science