N. Fender, P.J. Brock, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Paper
Laser-induced chemical vapor deposition of high-purity metals
Abstract
The laser chemical vapor deposition (LCVD) of aluminum and gold has been achieved via pyrolytic decomposition of trimethylamine aluminum hydride and dimethylgold (β-diketonates), respectively. The rates of metal deposition, the purity of the deposited metals, and the electrical properties of the deposits are a direct result of the chemical and physical properties of the precursor and the metal.
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