Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Previous studies had indicated promising use of lanthanide gallate perovskite-type substrates for the deposition of epitaxial, high-Tc superconducting Ba2YCu3O7-δ (BYCO) films. They were also found to have moderate dielectric constants (approximately 25 compared to approximately 277 for SrTiO3). This study was undertaken to further explore the use of LaGaO3, NdGaO3, SrTiO3, MgO, and Y-stabilized ZrO2 substrates, prepared from single-crystal boules grown by several suppliers using the Czochralski method. Films were prepared by cylindrical magnetron sputtering and laser ablation. Substrate evaluations included measurement of dielectric constant and loss, thermal expansion, and mechanical hardness and toughness. In addition to their moderate dielectric constants, they were found to have satisfactory mechanical properties, except for the twinning tendency of LaGaO3. Lattice mismatch strains were calculated for orthorhombic BYCO films on a number of substrates. NdGaO3 was found to have the best lattice match with BYCO, and is now available twin-free.
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
Matthias Kaiserswerth
IEEE/ACM Transactions on Networking
N.K. Ratha, A.K. Jain, et al.
Workshop CAMP 2000
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007