Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)

Hiroshi Ito, Reinhold Schwalm

JES

S. Cohen, T.O. Sedgwick, et al.

MRS Proceedings 1983

H.D. Dulman, R.H. Pantell, et al.

Physical Review B

J. Paraszczak, J.M. Shaw, et al.

Micro and Nano Engineering