Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The kinetics of isothermal H2 desorption from polycrystalline diamond are studied in real time. The surface H coverage (θH) is measured by mass analyzing the recoiled H+ ion signal during the desorption. We find that the H2 desorption is 1st order in θH with an activation energy of 69 ± 6 kcal mol and a prefactor of 1010.5 ± 0.9 s-1. We suggest that formation of a CC π-bond on the clean surface plays a key role in H2 desorption from diamond, a view consistent with previous theoretical calculations of H2 desorption from diamond. © 1994.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials