B.Y. Tsaur, J.W. Mayer, et al.
Journal of Applied Physics
A metastable silicide phase with a composition of Pt2Si 3 has been obtained by using ion-beam mixing techniques. To form the phase, a thin PtSi film on a Si substrate was first converted into a Si-rich amorphous Pt-Si alloy by implantation with energetic ions through the PtSi-Si interface. The amorphous alloy then transformed into the metastable crystalline phase upon post annealing at 350-500°C. X-ray diffraction analysis showed that the Pt2Si3 phase has a hexagonal crystal structure with lattice parameters a=3.841 Å and c=11.924 Å and there are ten atoms per unit cell. The phase was unstable at temperatures above 550°C and transformed back to PtSi and Si. The metastable Pt2Si3 phase was found to exhibit a superconducting transition onset at about 4.2°K and becomes completely superconductive below 3.6°K.
B.Y. Tsaur, J.W. Mayer, et al.
Journal of Applied Physics
R.D. Thompson, K.N. Tu
Applied Physics Letters
Marshall I. Nathan, John E. Smith Jr., et al.
Journal of Applied Physics
K.L. Kavanagh, M.A. Capano, et al.
Journal of Applied Physics