V.P. Kesan, P.G. May, et al.
IEDM 1990
Ink jet printing nozzle arrays in the form of truncated pyramidal holes anisotropically etched into a silicon substrate have been fabricated. Eight-nozzle arrays dixplay excellent performance characteristics with regard to uniformity of direction (<± 1mra), velocity (<± 10 cm/sec) at 1000-3000 cm/sec), and drop formation.
V.P. Kesan, P.G. May, et al.
IEDM 1990
L. Kuhn, M.L. Dakss, et al.
Applied Physics Letters
Z.A. Weinberg, G.W. Rubloff, et al.
Physical Review B
E. Bassous, A.C. Lamberti
Microelectronic Engineering