Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper, associated with a broader conference talk on the fundamental physical limits of information handling, emphasizes the aspects still least appreciated. Information is not an abstract entity but exists only through a physical representation, thus tying it to all the restrictions and possibilities of our real physical universe. The mathematician's vision of an unlimited sequence of totally reliable operations is unlikely to be implementable in this real universe. Speculative remarks about the possible impact of that, on the ultimate nature of the laws of physics are included.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sang-Min Park, Mark P. Stoykovich, et al.
Advanced Materials
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
Frank Stem
C R C Critical Reviews in Solid State Sciences