J.W. Coburn, E. Taglauer, et al.
Japanese Journal of Applied Physics
A simple phenomenological theory of alloy sputtering is developed which suggests that in some instances the depth resolution of depth profiling measurements is limited by the time it takes to create a layer of altered chemical composition at the surface.
J.W. Coburn, E. Taglauer, et al.
Japanese Journal of Applied Physics
Harold F. Winters
JVSTA
S.A. Barnett, Harold F. Winters, et al.
Surface Science
Yung-Yi Tu, T.J. Chuang, et al.
Physical Review B