Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
We briefly review recent progress in elucidating the time-independent critical behavior of systems with infinite numbers of static absorbing states, and show that the critical exponent describing the decay with time of the order parameter right at the critical point is the same as that of the directed percolation problem.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Yi Zhou, Parikshit Ram, et al.
ICLR 2023
Andrew Skumanich
SPIE Optics Quebec 1993