A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Directed self-assembly of cylinder forming block copolymer (c-BCP) thin films via a dynamic thermal field on multidimensional symmetric graphoepitaxy channels is reported. A synergy of dynamic thermal and static boundary fields induces highly aligned c-BCP cylinders inside the channels with a power law dependence of orientational order parameter f, on trench width, f ∼ d -0.3, analogous to dual-field alignment of semiconducting metals and liquid crystals on graphoepitaxy surfaces, f′ ∼ d-1. Static thermal annealing of identical films in a vacuum oven for several days fails to produce comparable results. Furthermore, we demonstrate global c-BCP cylinder alignment over mesas and trenches by tuning the synergy between the dynamic thermal field and asymmetry of the graphoepitaxy static field. © 2013 American Chemical Society.
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications