High-numerical-aperture optical designs

Rama N. Singh; Alan E. Rosenbluth; G. Chiu; J.S. Wilczynski

doi:10.1147/rd.411.0039

IBM J. Res. Dev

Paper

01 Jan 1997

High-numerical-aperture optical designs

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Abstract

This paper is an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.

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