High energy BSE/SE/STEM imaging of 8 um thick semiconductor interconnects

Paper

27 Aug 2014

Abstract

No abstract available.

Conference paper

C.-K. Hu, D. Canaperi, et al.

AMC 2003

Conference paper

C.-K. Hu, L. Gignac, et al.

Microelectronic Engineering

Review

C.-K. Hu, L. Gignac, et al.

Journal of Applied Physics

Paper

C.-K. Hu, L. Gignac, et al.

Microelectronics Reliability