A micromachined W-band iris filter
Firas Sammoura, Ying Cai, et al.
TRANSDUCERS 2005
This paper describes a micro-actuator for high-bandwidth tracking servo, where a microactuator is attached between slider and suspension, and moves the slider relative to the suspension. The micro-actuator frequency response measurement proved that this micro-actuator can be modeled as an ideal spring-mass-damper system up to 80 kHz, so that very high bandwidth servo system can be easily designed. The maximum servo bandwidth of 6, 4 kHz was achieved in a drive level experiment, which is the highest bandwidth ever demonstrated as a drive level. A rapid step response time of 0. 2 mS for 0. 6 βm step was also achieved. The experimental bandwidth was not limited by the micro-actuator's resonance mode, but the saturation of the micro-actuator driver. ©1999 IEEE.
Firas Sammoura, Ying Cai, et al.
TRANSDUCERS 2005
Tetsuo Semba, Toshiki Hirano, et al.
IEEE Transactions on Magnetics
Toshiki Hirano, Long-Sheng Fan, et al.
JMEMS
Tetsuo Semba, Katsuhisa Furuta
Mathematical Problems in Engineering