Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have measured the heat capacity of a series of films of aluminum in Al2O3, with normalstate resistivities N from 2 × 10-5 cm to 4 × 10-2 cm. The lattice heat capacity is greater than for the separate bulk constituents, but there is no evidence for a change in the electronic specific heat capacity. The specimens become superconducting with a heat-capacity transition which is BCS-like for low N and diminishes as N becomes greater than 10-3 cm, until it is no longer observable for the highest N. We conclude that as N increases the grains become decoupled. The size of the grains is such that thermodynamic fluctuations prevent the existence of bulk superconducting properties when they are isolated. © 1980 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Peter J. Price
Surface Science
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials
John G. Long, Peter C. Searson, et al.
JES