K.N. Tu
Materials Science and Engineering: A
It has been found that annealing Pd-Er deposits on a (001) silicon surface results in the formation of isolated submicron islands of Pd2Si with two epitaxially oriented habits. By contrast, when Pd is annealed on a (111) silicon substrate, Pd2Si is formed with full coverage and a specific epitaxy.
K.N. Tu
Materials Science and Engineering: A
H. Takai, P.A. Psaras, et al.
Journal of Applied Physics
I. Ohdomari, M. Hori, et al.
Journal of Applied Physics
T.C. Chou, C.Y. Wong, et al.
Journal of Applied Physics