Arjen Boersma, Sjoukje Wiegersma, et al.
SPIE OPTO 2013
A scalable and tolerant optical interfacing method based on flipchip bonding is developed for silicon photonics packaging. Bidirectional optical couplers between multiple silicon-on-insulator waveguides and single-mode polymer waveguides are designed and fabricated. Successful operation is verified experimentally in the 1530-1570 nm spectral window. At the wavelength of 1570 nm, the coupling loss is as low as 0.8 dB for both polarization states and the planar misalignment loss is less than 0.6 dB for TE and 0.3 dB for TM polarization in a lateral silicon-polymer waveguide offset range of ± 2 μm. The coupling loss does not exhibit any temperature dependence up to the highest measurement point of 70°C. © 2013 Optical Society of America.
Arjen Boersma, Sjoukje Wiegersma, et al.
SPIE OPTO 2013
Bert Jan Offrein
IPC 2012
Antonio La Porta, Jonas Weiss, et al.
ECTC 2015
N. Gong, Malte J. Rasch, et al.
IEDM 2022