Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
This paper reviews recent experimental and conceptual progress in molecule-surface dynamics. A very brief account is first given of the experimental methodology. Several recent experiments are then discussed, hopefully critically. These include some for both inelastic processes and for the reactive processes of dissociative adsorption and associative desorption. Attention is focussed on the limitations of simple dynamical models in accounting for these new and detailed results. © IOP Publishing Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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