J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
No abstract available.
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
T. Graham, A. Afzali, et al.
Microlithography 2000
A. Skumanich
SPIE OE/LASE 1992
Sankar Basu
Journal of the Franklin Institute