B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
B.A. Hutchins, T.N. Rhodin, et al.
Surface Science
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Mark W. Dowley
Solid State Communications
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007