Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
An interactive approach to the formulation, modeling, analysis, and solution of discrete deterministic dynamic programming problems is presented. The approach utilizes APL both as the mathematical and the programming language. The interactive capabilities of APL and the simple one-to-one correspondence between the programming and the mathematical language provide an extremely convenient environment for dynamic programming investigations in general and for teaching/learning purposes in particular. The approach is illustrated by a simple model and a numerical example. © 1982.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Daniel J. Costello Jr., Pierre R. Chevillat, et al.
ISIT 1997
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Robert Manson Sawko, Malgorzata Zimon
SIAM/ASA JUQ