Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Dry etch challenges of 0.25 μm dual damascene structures
Abstract
No abstract available.
Related
J.W.M. Frenken, R.J. Hamers, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Moisture-induced interfacial oxidation of chromium on polyimide
B.K. Furman, H.M. Clearfield, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Conference paper
Study particle emission in vacuum from film deposits
Joseph S. Logan, James J. McGill
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films