Conference paper
Sensitive polysilane resists for bilayer lithography
G.M. Wallraff, R.D. Miller, et al.
ACS Spring 1991
G.M. Wallraff, R.D. Miller, et al.
ACS Spring 1991
Jeff W. Labadie, K.R. Carter, et al.
Polymer Bulletin
W.D. Hinsberg, G.M. Wallraff, et al.
American Chemical Society, Polymer Preprints, Division of Polymer Chemistry
R.D. Allen, I.Y. Wan, et al.
J. Photopolym. Sci. Tech.